Table 1 Piezoresistive coefficients for the holes (p-Si) and electrons (n-Si) of silicon determined experimentally (exp.) or theoretically (th.) in TPa−1

From: Phonon-limited mobility for electrons and holes in highly-strained silicon

 

n-Si

p-Si

Doping

 

π11

π12

π11

π12

(cm−3)

Smith60 (exp.)

−1022

534

66

−11

5 × 1014

Matsuda et al.64 (exp.)

−840

430

4 × 1016

Tufte and Stelzer55 (exp.)

−1077

5 × 1016

Cho et al.86 (exp.)

−691

390

29

−6

1018

This work (exp.)

−632

403

5 × 1017

Matsuda et al.64 (th.)

−970

480

undoped

Dorey and Maddern87 (th.)

213

−108

undoped

This work (th.)

−989

502

148

−72

undoped