Fig. 9: Sorting effect of different particle targets.

a 10 μm fluorescent microspheres sorting. b Photomultiplier tube samples signal for fluorescence detection. c 10 μm PS microspheres sorting. d Silicon photodiode samples signals for PS microspheres detection. e 10 μm magnetic beads sorting. f Silicon photodiode samples signals for magnetic detection. g Miniaturized optical path structure.