Fig. 3: Workspace evaluation for the optimal XYθz nanopositioner prototype.

These experiments were conducted based on an open-loop control scheme. A Evaluation of the maximum X-axis translation achievable by the prototype. (i) and (ii) represented the extreme displacements of the prototype’s end-effector along the X-axis. B Evaluation of the maximum Y-axis translation achievable by the prototype. (i) and (ii) represented the extreme displacements of the prototype’s end-effector along the Y-axis. C Evaluation of the maximum Z-axis rotation achievable by the prototype. (i) and (ii) showed the extreme Z-axis angular displacements of the prototype.