Laser probing of integrated circuits using sub-bandgap photon energies remains a challenge. Here, the authors propose a super-resolution method capable of achieving probe placement accuracy to better than 10 nm; extraction of electro-optic waveforms from a node of a group of transistors and applied this to isolate and identify a fault on a defective device.
- V. K. Ravikumar
- Jiann Min Chin
- Joel K. W. Yang
