Growth of AlxGa1-xN Thin Films with Controllable Composition and Optical Bandgap on 4H-SiC by Sub-Cycle Incomplete Reaction Plasma Enhanced Atomic Layer Deposition
- Journal:
- Advanced Functional Materials
- Published:
- Affiliations:
- 5
- Authors:
- 9
| Institutions | Authors | Share |
|---|---|---|
| University of Science and Technology Beijing (USTB), China | 0.74 | |
| Institute of Semiconductors (IOS), CAS, China | 0.11 | |
| Beijing University of Technology (BJUT), China | 0.11 | |
| Wenzhou Medical University (WMU), China | 0.04 |