Positive-Tone Nanolithography of Antimony Trisulfide with Femtosecond Laser Wet-Etching

Journal:
Advanced Functional Materials
Published:
DOI:
10.1002/adfm.202511043
Affiliations:
8
Authors:
13
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Institutions Authors Share
Leibniz Institute of Photonic Technology (IPHT), Germany
7.783333
 0.60
Friedrich Schiller University Jena (FSU), Germany
2.033333
 0.16
Institut des Sciences Chimiques de Rennes (ISCR), France
2.000000
 0.15
Abbe Center of Photonics (ACP), Germany
0.783333
 0.06
Research Center for Applied Sciences, Academia Sinica, Taiwan
0.200000
 0.02
National Yang Ming Chiao Tung University (NYCU), Taiwan
0.200000
 0.02
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