Wafer-Scale Integration of α-quartz Thin Films toward Super High Frequency Piezoelectric bioNEMS for Chikungunya Virus Detection

Journal:

Advanced Functional Materials

Published:

2025-07-16

DOI:

10.1002/adfm.202514484

Affiliations:

5

Authors:

13

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Institutions	Authors	Share
Institut d'Electronique et des Systèmes (IES), France	6.000000	0.46
Institut de Recherche en Infectiologie de Montpellier (IRIM), France	3.000000	0.23
Centre for Radiofrequencies, Optic and Micro-nanoelectronics in the Alps (CROMA), France	2.000000	0.15
Institute of Materials Science of Barcelona (ICMAB), CSIC, Spain	1.000000	0.08
Rovira i Virgili University (URV), Spain	1.000000	0.08

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