Ring‐Opening of Cyclosiloxanes Induced Etching Amplification for Area Selective Deposition of SiOC Films

Journal:

Advanced Functional Materials

Published:

2026-04-04

DOI:

10.1002/adfm.202528933

Affiliations:

3

Authors:

13

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Institutions	Authors	Share
Zhejiang University (ZJU), China	6.500000	0.50
State Key Laboratory of Chemical Engineering and Low-carbon Technology, China	5.500000	0.42
National Key Laboratory of Biobased Transportation Fuel Technology, China	1.000000	0.08

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