Role of Precursor Miscibility in Area‐Selective Atomic Layer Deposition

Journal:: Advanced Materials
Published:: 2025-08-20
DOI:: 10.1002/adma.202506699
Affiliations:: 3
Authors:: 6

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Institutions	Authors	Share
Stanford University, United States of America (USA)	5.500000	0.92
SLAC National Accelerator Laboratory, United States of America (USA)	0.500000	0.08

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