Ultrathin Monatomic Antimony Films by Sacrificial Atomic Layer Deposition for Phase Change Memory

Journal:
Advanced Materials
Published:
DOI:
10.1002/adma.202519924
Affiliations:
3
Authors:
10
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Institutions Authors Share
Seoul National University (SNU), South Korea
9.000000
 0.90
Hongik University, South Korea
1.000000
 0.10
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