Femtosecond Laser Non-Diffracting-Beam Lithography via Phase Modulation for Dielectric Metasurface Fabrication

Journal:

Advanced Materials

Published:

2026-01-09

DOI:

10.1002/adma.202521635

Affiliations:

5

Authors:

12

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Institutions	Authors	Share
Beijing Institute of Technology (BIT), China	9.000000	0.75
State Key Laboratory of Precision Manufacturing for Extreme Service Performance, CSU, China	1.000000	0.08
Swiss Federal Institute of Technology Zurich (ETH Zurich), Switzerland	1.000000	0.08
China Electronics Technology Group Corporation (CETC), China	1.000000	0.08

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