Rare Mononuclear Lithium–Carbene Complex for Atomic Layer Deposition of Lithium Containing Thin Films

Journal:
Angewandte Chemie International Edition
Published:
Affiliations:
8
Authors:
11
Institutions Authors Share
Tyndall National Institute (TNI), Ireland
3.000000
0.27
Ruhr University Bochum (RUB), Germany
2.250000
0.20
Ilmenau University of Technology (TU Ilmenau), Germany
2.000000
0.18
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Germany
1.250000
0.11
Leibniz Institute for Solid State and Materials Research (IFW Dresden), Germany
1.250000
0.11
Federal Institute for Materials Research and Testing (BAM), Germany
1.000000
0.09
TU Dresden, Germany
0.250000
0.02