Experimental investigation of tribological behavior of textured pads and their potential application in flexible ball-end tool polishing

Journal:
Journal of Cleaner Production
Published:
DOI:
10.1016/j.jclepro.2025.146527
Affiliations:
3
Authors:
8
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Institutions Authors Share
Ningbo University (NBU), China
7.666667
 0.96
State Key Laboratory of Silicon and Advanced Semiconductor Materials, ZJU, China
0.333333
 0.04
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