Recovery of fluoride toward sustainable integrated circuit manufacturing: Quantifying water–energy–carbon–fluorine footprints in China

Journal:

Journal of Cleaner Production

Published:

2026-04-08

DOI:

10.1016/j.jclepro.2026.148090

Affiliations:

4

Authors:

12

Go to article

Institutions	Authors	Share
Shanghai University (SHU), China	7.500000	0.63
Hamburg University of Technology (TUHH), Germany	2.500000	0.21
Semiconductor Manufacturing International Corporation (SMIC), China	2.000000	0.17

Interested in Applied Economics?