Trinuclear Tin Complexes for Advanced Lithography: Sensitivity Enhancement via the Synergistic Effect in Dual Cross-Linking Systems

Journal:
Inorganic Chemistry
Published:
DOI:
10.1021/acs.inorgchem.5c00501
Affiliations:
3
Authors:
13
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Institutions Authors Share
State Key Laboratory of Fine Chemicals, DUT, China
11.500000
11.500000
 0.88
Shanghai Synchrotron Radiation Facility (SSRF), SARI CAS, China
1.000000
 0.08
Shenzhen University (SZU), China
0.500000
 0.04
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