Heteroleptic Ruthenium p-Cymene Amidinate Complexes─A Synthetic Endeavor to Unearth Precursors for Ru Thin Films

Journal:
Inorganic Chemistry
Published:
DOI:
10.1021/acs.inorgchem.5c03227
Affiliations:
7
Authors:
11
Institutions Authors Share
Ruhr University Bochum (RUB), Germany
7.750000
0.70
Heraeus Precious Metals GmbH Co, Germany
2.000000
0.18
Leibniz Institute for Solid State and Materials Research (IFW Dresden), Germany
0.750000
0.07
TU Dresden, Germany
0.250000
0.02
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Germany
0.250000
0.02