Molecular Insights into Oxime-Containing Group 4 Transition Metal Precursors for Atomic Layer Deposition
- Journal:
- Inorganic Chemistry
- Published:
- DOI:
- 10.1021/acs.inorgchem.5c04097
- Affiliations:
- 3
- Authors:
- 7
| Institutions | Authors | Share |
|---|---|---|
| Korea Research Institute of Chemical Technology (KRICT), South Korea | 0.71 | |
| University of Science and Technology (UST), South Korea | 0.14 | |
| Chonnam National University, South Korea | 0.14 |