Molecular Insights into Oxime-Containing Group 4 Transition Metal Precursors for Atomic Layer Deposition

Journal:
Inorganic Chemistry
Published:
DOI:
10.1021/acs.inorgchem.5c04097
Affiliations:
3
Authors:
7
Institutions Authors Share
Korea Research Institute of Chemical Technology (KRICT), South Korea
5.000000
0.71
University of Science and Technology (UST), South Korea
1.000000
0.14
Chonnam National University, South Korea
1.000000
0.14