Synthesis, Characterization, and Electron-Beam Lithography of Tetakis(Triphenylstannyl) Orthosilicate and Tetrakis(Triacetoxystannyl) Orthosilicate for the Development of Inorganic Molecular EUV Resists

Journal:
Inorganic Chemistry
Published:
DOI:
10.1021/acs.inorgchem.6c00250
Affiliations:
2
Authors:
7
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Institutions Authors Share
Chonnam National University, South Korea
4.000000
 0.57
JSI Silicon Co., Ltd., South Korea
3.000000
 0.43
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