Transition Metal Dichalcogenide MoS2: Oxygen and Fluorine Functionalization for Selective Plasma Processing

Journal:
The Journal of Physical Chemistry Letters
Published:
DOI:
10.1021/acs.jpclett.6c00348
Affiliations:
2
Authors:
4
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Institutions Authors Share
Princeton Plasma Physics Laboratory (PPPL), United States of America (USA)
3.500000
 0.88
Princeton University, United States of America (USA)
0.500000
 0.13
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