Reference-Free Quantitative Mass Spectrometry Enables Sequencing of Resist Copolymers and Reveals Sequence-Dependent Deprotection Sensitivity

Journal:
Macromolecules
Published:
DOI:
10.1021/acs.macromol.5c03032
Affiliations:
1
Authors:
4
Go to article
Institutions Authors Share
Research Center for Macromolecules and Biomaterials, NIMS, Japan
4.000000
 1.00
Interested in Nanotechnology?