Characterization of Sub-Optical-Wavelength Structures through Optically Opaque Films Using Picosecond Ultrasonics

Journal:
Nano Letters
Published:
DOI:
10.1021/acs.nanolett.5c00800
Affiliations:
2
Authors:
4
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Institutions Authors Share
Advanced Research Center for Nanolithography (ARCNL), Netherlands
3.500000
 0.88
Delft University of Technology (TU Delft), Netherlands
0.500000
 0.13
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