Low-Temperature Layer-by-Layer Epitaxy of Ferroelectric Al0.63Sc0.37N Thin Films for Back-End-of-Line Integration

Journal:
Nano Letters
Published:
DOI:
10.1021/acs.nanolett.5c04014
Affiliations:
4
Authors:
9
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Institutions Authors Share
Southern University of Science and Technology (SUSTech), China
8.666667
 0.96
Harbin Institute of Technology (HIT), China
0.333333
 0.04
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