Scalable Wafer-Level Fabrication of Slanted TiO2 Gratings for Directional Visible Light Control

Journal:
Nano Letters
Published:
DOI:
10.1021/acs.nanolett.5c04104
Affiliations:
3
Authors:
8
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Institutions Authors Share
Nankai University (NKU), China
5.000000
 0.63
Leuven Instruments, China
2.000000
 0.25
GermanLitho, China
1.000000
 0.13
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