Defect Engineering of HfO2-Based Thin Films for Simultaneously Achieving High Polarization and Excellent Fatigue Resistance: Mediating Double-Edged Role of Oxygen Vacancies

Journal:
Nano Letters
Published:
DOI:
10.1021/acs.nanolett.5c04597
Affiliations:
4
Authors:
12
Institutions Authors Share
Xidian University, China
7.500000
0.63
China Electronics Technology Group Corporation (CETC), China
3.000000
0.25
Xiangtan University (XTU), China
1.500000
0.13