Wafer-Scale All-Dielectric Quasi-BIC Metasurfaces: Bridging High-Throughput Deep-UV Lithography with Nanophotonic Applications

Journal:
Nano Letters
Published:
DOI:
10.1021/acs.nanolett.5c05226
Affiliations:
3
Authors:
8
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Institutions Authors Share
University of Wisconsin-Madison (UW-Madison), United States of America (USA)
6.000000
 0.75
University of California, Santa Barbara (UCSB), United States of America (USA)
2.000000
 0.25
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