Enhanced Secondary-Electron Detection of Single-Ion Implants in Silicon through Thin SiO2 Layers

Journal:: Nano Letters
Published:: 2026-01-09
DOI:: 10.1021/acs.nanolett.5c05280
Affiliations:: 3
Authors:: 10

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Institutions	Authors	Share
University of Surrey, United Kingdom (UK)	9.000000	0.90
Ionoptika Ltd., United Kingdom (UK)	1.000000	0.10

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