Enhanced Secondary-Electron Detection of Single-Ion Implants in Silicon through Thin SiO2 Layers

Journal:
Nano Letters
Published:
DOI:
10.1021/acs.nanolett.5c05280
Affiliations:
3
Authors:
10
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Institutions Authors Share
University of Surrey, United Kingdom (UK)
9.000000
 0.90
Ionoptika Ltd., United Kingdom (UK)
1.000000
 0.10
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