Nanoscale Additive Manufacturing of Sub-24 nm Spacing Silicon Nanowire Arrays and High-Performance GAA FET Based on SiO2/SiNx Stacked Multilayers

Journal:
Nano Letters
Published:
DOI:
10.1021/acs.nanolett.6c00801
Affiliations:
1
Authors:
6
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Institutions Authors Share
Nanjing National Laboratory of Microstructures (NNLM), NJU, China
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