Foundry-Enabled Patterning of Diamond Quantum Microchiplets for Scalable Quantum Photonics

Journal:

Nano Letters

Published:

2026-05-07

DOI:

10.1021/acs.nanolett.6c01048

Affiliations:

5

Authors:

9

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Institutions	Authors	Share
MITRE, United States of America (USA)	4.000000	0.44
Massachusetts Institute of Technology (MIT), United States of America (USA)	3.833333	0.43
PhotonFoundries, United States of America (USA)	0.833333	0.09
King Abdullah University of Science and Technology (KAUST), Saudi Arabia	0.333333	0.04

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