Three-Dimensional Nanopatterning Using Extreme Ultraviolet Colloidal Talbot Lithography

Journal:: Nano Letters
Published:: 2026-05-27
DOI:: 10.1021/acs.nanolett.6c01662
Affiliations:: 1
Authors:: 5

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Institutions	Authors	Share
The University of Texas at Austin (UT Austin), United States of America (USA)	5.000000	1.00

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