Structure-in-Void Quasi-Bound State in the Continuum Metasurface for Deeply Subwavelength Nanostructure Metrology

Journal:

ACS Nano

Published:

2025-09-02

DOI:

10.1021/acsnano.5c03366

Affiliations:

4

Authors:

4

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Institutions	Authors	Share
Institute for Atomic and Molecular Physics (AMOLF), NWO-I, Netherlands	1.500000	0.38
Advanced Research Center for Nanolithography (ARCNL), Netherlands	1.333333	0.33
Institute for Lasers, Life and Biophotonics Amsterdam (LaserLaB Amsterdam), Netherlands	0.833333	0.21
ASML, Netherlands	0.333333	0.08

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