Engineering Ni-Silicide Nanocontacts for 3D Silicon Devices via Geometrical Confinement Control

Journal:: ACS Nano
Published:: 2025-08-12
DOI:: 10.1021/acsnano.5c07195
Affiliations:: 1
Authors:: 5

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Institutions	Authors	Share
Laboratory of Analysis and Architecture of Systems (LAAS), France	5.000000	1.00

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