Extremely Uniform Growth Integration of Stacked Silicon Nanowire Channels for High-Performance Transistors via an Embedded-Precursor-Feeding Strategy

Journal:
ACS Nano
Published:
DOI:
10.1021/acsnano.5c09735
Affiliations:
3
Authors:
9
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Institutions Authors Share
Nanjing National Laboratory of Microstructures (NNLM), NJU, China
7.000000
 0.78
Zhejiang University (ZJU), China
1.000000
 0.11
Yangzhou University (YZU), China
1.000000
 0.11
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