Production-Ready Double-Sided Fabrication of Dual-Band Infrared Metaoptics Using Deep-Ultraviolet Lithography

Journal:
ACS Nano
Published:
DOI:
10.1021/acsnano.5c11908
Affiliations:
3
Authors:
6
Go to article
Institutions Authors Share
University of Southampton (Soton), United Kingdom (UK)
5.000000
 0.83
Qioptiq, United Kingdom (UK)
1.000000
 0.17
Interested in Macromolecular and Materials Chemistry?