Improving the Lifetime of Aluminum-Based Superconducting Qubits through Atomic Layer Etching and Deposition
- Journal:
- ACS Nano
- Published:
- DOI:
- 10.1021/acsnano.5c14022
- Affiliations:
- 1
- Authors:
- 12
| Institutions | Authors | Share |
|---|---|---|
| AWS Center for Quantum Computing, United States of America (USA) | 1.00 |