Improving the Lifetime of Aluminum-Based Superconducting Qubits through Atomic Layer Etching and Deposition

Journal:
ACS Nano
Published:
DOI:
10.1021/acsnano.5c14022
Affiliations:
1
Authors:
12
Institutions Authors Share
AWS Center for Quantum Computing, United States of America (USA)
12.000000
12.000000
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