High-Density Sub-10 nm Silicon Nanowires Fabricated via Directed Self-Assembly and Sequential Infiltration Synthesis Synergistic Patterning for Multiple Applications

Journal:
ACS Nano
Published:
DOI:
10.1021/acsnano.5c16910
Affiliations:
3
Authors:
14
Institutions Authors Share
Fudan University, China
11.000000
11.000000
0.79
Zhangjiang Laboratory, China
3.000000
0.21