Patterned, Low-Temperature Growth of Transition Metal Dichalcogenides for Low Resistance Raised Contacts

Journal:
ACS Nano
Published:
DOI:
10.1021/acsnano.5c17039
Affiliations:
7
Authors:
12
Institutions Authors Share
Lawrence Berkeley National Laboratory (LBNL), United States of America (USA)
6.750000
0.56
University of California, Berkeley (UC Berkeley), United States of America (USA)
5.000000
0.42
Kavli Energy NanoSciences Institute at Berkeley, United States of America (USA)
0.250000
0.02