Near Room-Temperature Atomic Layer Deposition of Magnesium Oxide Using Bis-3-(N,N-dimethylamino)propyl Magnesium(II) and Water

Journal:

Journal of the American Chemical Society

Published:

2025-08-24

DOI:

10.1021/jacs.5c08514

Affiliations:

7

Authors:

8

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Institutions	Authors	Share
Ruhr University Bochum (RUB), Germany	4.750000	0.59
Tyndall National Institute (TNI), Ireland	2.000000	0.25
Leibniz Institute for Solid State and Materials Research (IFW Dresden), Germany	0.750000	0.09
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Germany	0.250000	0.03
TU Dresden, Germany	0.250000	0.03

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