Direct observation of 3D nitrogen distribution in silicon-based dielectrics using atom probe tomography

Journal:
Nature Communications
Published:
DOI:
10.1038/s41467-025-60732-2
Affiliations:
3
Authors:
13
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Institutions Authors Share
Samsung Advanced Institute of Technology (SAIT), South Korea
7.000000
 0.54
Samsung Electronics Co., Ltd., South Korea
4.000000
 0.31
Korea University, South Korea
2.000000
 0.15
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