Sacrifice-layer-free transfer of wafer-scale atomic-layer-deposited dielectrics and full-device stacks for two-dimensional electronics

Journal:
Nature Communications
Published:
DOI:
10.1038/s41467-025-60864-5
Affiliations:
2
Authors:
11
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Institutions Authors Share
Nankai University (NKU), China
10.000000
10.000000
 0.91
MOE Key Laboratory of Weak Light Nonlinear Photonics, NKU, China
1.000000
 0.09
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