Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit

Journal:
Nature Communications
Published:
DOI:
10.1038/s41467-025-60957-1
Affiliations:
2
Authors:
8
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Institutions Authors Share
University of Strathclyde, United Kingdom (UK)
6.000000
 0.75
Massachusetts Institute of Technology (MIT), United States of America (USA)
2.000000
 0.25
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