Cryo-electron tomography reconstructs polymer in liquid film for fab-compatible lithography

Journal:

Nature Communications

Published:

2025-09-30

DOI:

10.1038/s41467-025-63689-4

Affiliations:

7

Authors:

16

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Institutions	Authors	Share
Beijing National Laboratory for Molecular Sciences (BNLMS), China	7.333333	0.46
Tsinghua - PKU Joint Center for Life Sciences (CLS), China	4.000000	0.25
Shandong University (SDU), China	2.000000	0.13
Hangzhou STS Semiconductor and Technology, China	1.000000	0.06
The University of Hong Kong (HKU), China	1.000000	0.06
Changping Laboratory, China	0.333333	0.02
Peking University (PKU), China	0.333333	0.02

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