Phase-probability shaping for speckle-free holographic lithography

Journal:
Nature Communications
Published:
DOI:
10.1038/s41467-025-64554-0
Affiliations:
3
Authors:
6
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Institutions Authors Share
University of Science and Technology of China (USTC), China
4.833333
 0.81
Anhui University (AHU), China
1.166667
 0.19
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