Optical interference for the guidance of cryogenic focused ion beam milling beyond the axial diffraction limit

Journal:

Nature Communications

Published:

2026-01-14

DOI:

10.1038/s41467-025-65548-8

Affiliations:

5

Authors:

9

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Institutions	Authors	Share
Stanford Synchrotron Radiation Lightsource (SSRL), United States of America (USA)	4.000000	0.44
Rutgers, The State University of New Jersey (RU), United States of America (USA)	3.000000	0.33
Brigham Young University (BYU), United States of America (USA)	1.000000	0.11
DELMIC B.V., Netherlands	0.500000	0.06
Delft University of Technology (TU Delft), Netherlands	0.500000	0.06

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