Information advantage in sensing revealed by Fano-resonant Fourier scatterometry

Journal:

Nature Communications

Published:

2025-12-10

DOI:

10.1038/s41467-025-66187-9

Affiliations:

4

Authors:

4

Go to article

Institutions	Authors	Share
Institute for Atomic and Molecular Physics (AMOLF), NWO-I, Netherlands	1.500000	0.38
Advanced Research Center for Nanolithography (ARCNL), Netherlands	1.333333	0.33
Institute for Lasers, Life and Biophotonics Amsterdam (LaserLaB Amsterdam), Netherlands	0.833333	0.21
ASML, Netherlands	0.333333	0.08

Interested in Atomic, Molecular and Optical Physics?