High-κ dielectric van der Waals integration on 2D semiconductors for three-dimensional complementary logic systems

Journal:
Nature Communications
Published:
DOI:
10.1038/s41467-025-66770-0
Affiliations:
5
Authors:
7
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Institutions Authors Share
Sungkyunkwan University (SKKU), South Korea
5.000000
 0.71
Korea Advanced Institute of Science and Technology (KAIST), South Korea
2.000000
 0.29
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