A universal all-dry microfabrication method for sensitive electronic materials via an inorganic molecular lithographic mediator

Journal:

Nature Communications

Published:

2026-01-28

DOI:

10.1038/s41467-026-68593-z

Affiliations:

3

Authors:

15

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Institutions	Authors	Share
State Key Laboratory of Material Processing and Die and Mould Technology, HUST, China	12.500000 12.500000	0.83
MOE Key Laboratory of Flexible Optoelectronic Materials and Technology, Jianghan University, China	2.000000	0.13
Hubei Yangtze Memory Laboratories, China	0.500000	0.03

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