Enhancing film bulk acoustic resonators performance by optimizing AlN seed layer crystallinity and polarity alignment

Journal:
Nature Communications
Published:
DOI:
10.1038/s41467-026-69096-7
Affiliations:
5
Authors:
16
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Institutions Authors Share
Wuhan University (WHU), China
13.666667
13.666667
 0.85
MOE Key Laboratory of Artificial Micro- and Nano-structures, WHU, China
2.000000
 0.13
Wuhan Institute of Quantum Technology, China
0.333333
 0.02
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