Copper damascene process-based high-performance thin-film lithium tantalate modulators

Journal:
Nature Communications
Published:
DOI:
10.1038/s41467-026-69588-6
Affiliations:
4
Authors:
11
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Institutions Authors Share
Swiss Federal Institute of Technology Lausanne (EPFL), Switzerland
9.000000
 0.82
Karlsruhe Institute of Technology (KIT), Germany
2.000000
 0.18
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