Broadband extreme ultraviolet zeroth order scatterometry for nanostructure metrology

Journal:

Nature Communications

Published:

2026-05-19

DOI:

10.1038/s41467-026-73052-w

Affiliations:

3

Authors:

8

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Institutions	Authors	Share
Advanced Research Center for Nanolithography (ARCNL), Netherlands	7.000000	0.88
University of Amsterdam (UvA), Netherlands	0.500000	0.06
Institute for Lasers, Life and Biophotonics Amsterdam (LaserLaB Amsterdam), Netherlands	0.500000	0.06

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