Localized carbon deposition enables trimming of photonic integrated circuits

Journal:
Nature Communications
Published:
DOI:
10.1038/s41467-026-73411-7
Affiliations:
4
Authors:
17
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Institutions Authors Share
Heidelberg University (Uni Heidelberg), Germany
14.000000
14.000000
 0.82
University of Münster (WWU), Germany
2.000000
 0.12
University of Oxford, United Kingdom (UK)
1.000000
 0.06
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